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See UV Light Meters for 3D Printing
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for all Steppers & Mask Aligners

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OAI Product Brochure 2015

Product Highlight

NEW! Model 6000
Production Mask Aligner

OAI Model 6000 production Mask Aligners

Built on the venerable OAI modular platform, the Series 6000 has frontside or backside alignment that is fully automated with sub-micron resolution which delivers performance that is unmatched at any price.

The Aligners have Advanced Beam Optics with better than ±3% uniformity and a throughput of 180 wafers per hour in first mask mode, which results in higher yields. The Series 6000 can handle a wide variety of wafers from thick and bonded substrates (up to 7000 microns), warped wafers (up to 7 mm-10mm), thin substrates (down to 100 micron thick), and thick photo resist.


New Services
at OAI

Resistivity Testing Service for Conductive and Non-Conductive Materials

OAI Resistivity Test Lab
Answering the growing demand for resistivity testing, OAI is now offering conductive and non-conductive materials testing in their Resistivity Test Lab in San Jose, CA. Tests are completed within ten days of receipt of test sample material, and each test results in a comprehensive report.

For orders of more info
Call (800) 843-8259

Download for pricing and specs
OAI Resistivity Services for Conductive and NonConductive Materials

Our Focus is on the Customer

OAI is a Silicon Valley-based manufacturer of advanced precision equipment for the Solar, Photovoltaic, Semiconductor, MEMS, and Microfluidics Industries. The company offers a broad portfolio of field-proven products that include Mask Aligners, UV Exposure Systems, UV Light Sources, Solar Simulators, I-V Testers and Reference Cells.

OAI maintains a commitment to long-term relationships as demonstrated by OAI's focus on engineering, service, and customer support. With over 40 years of experience, and thousands of systems in use around the world, the company has earned a reputation for exceptional products, favorable pricing, and superior customer support. OAI products deliver outstanding performance, exceptional versatility, and proven reliability.

oai model 800e

Model 800E Enhanced Mask Aligner

The new OAI Model 800E front and backside, semi-automatic mask aligner system offers advanced features and specifications found most often in costly automated production mask aligners. With the development of this new mask aligner, OAI meets the growing challenge of a dynamic semiconductor and MEMS market with a new class of mask aligners that are engineered for R&D and low volume production.

Built on OAI’s proven modular platform, the Model 800E is an enhanced, high-performance, high-resolution lithography system which delivers a level of performance that is offered at an extremely compelling price point. The aligner system features OAI’s Advanced Beam Optics which delivers exceptional uniformity. Upgradable using OAI’s Precision Lithography Modules, the Model 800E is a highly versatile tool in the lab or in low-volume production. The Model 800E utilizes a Windows 7 PC control platform with extensive recipe storage capacity. The system also comes with joystick-controlled alignment and optics stages, and can be configured with non-contact, 3-point wedge effect correction and auto-align capability. These combined features are typically found in automated production mask aligner systems but are now available on the Model 800E at a more affordable price.

The Model 800E is unique owing to the inclusion of advanced features which are found in the OAI Model 6000 production mask aligner tool. By utilizing the proven OAI modular mask aligner platform, we are able to adopt technology from our more advanced tools to produce a powerful system at a more affordable price.

Standard front-side mask aligner features include: Dual 1MP resolution GIGE CCD cameras, motorized joystick, vacuum, hard soft & proximity exposure modes and Auto Wedge Effect Compensation. Standard backside features include all front-side features plus two additional cameras, digital zoom and motorized backside optics focus.
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