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for all Steppers & Mask Aligners

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OAI Product Brochure 2015

Product Highlight

NEW! Model 6000
Production Mask Aligner

OAI Model 6000 production Mask Aligners

Built on the venerable OAI modular platform, the Series 6000 has topside or backside alignment that is fully automated with sub-micron resolution which delivers performance that is unmatched at any price.

The Aligners have Advanced Beam Optics with better than ±3% uniformity and a throughput of 180 wafers per hour in first mask mode, which results in higher yields. The Series 6000 can handle a wide variety of wafers from thick and bonded substrates (up to 7000 microns), warped wafers (up to 7 mm-10mm), thin substrates (down to 100 micron thick), and thick photo resist.


New Services
at OAI

Resistivity Testing Service for Conductive and Non-Conductive Materials

OAI Resistivity Test Lab
Answering the growing demand for resistivity testing, OAI is now offering conductive and non-conductive materials testing in their Resistivity Test Lab in San Jose, CA. Tests are completed within ten days of receipt of test sample material, and each test results in a comprehensive report.

For orders of more info
Call (800) 843-8259

Download for pricing and specs
OAI Resistivity Services for Conductive and NonConductive Materials

Our Focus is on the Customer

OAI is a Silicon Valley-based manufacturer of advanced precision equipment for the Solar, Photovoltaic, Semiconductor, MEMS, and Microfluidics Industries. The company offers a broad portfolio of field-proven products that include Mask Aligners, UV Exposure Systems, UV Light Sources, Solar Simulators, I-V Testers and Reference Cells.

OAI maintains a commitment to long-term relationships as demonstrated by OAI's focus on engineering, service, and customer support. With over 40 years of experience, and thousands of systems in use around the world, the company has earned a reputation for exceptional products, favorable pricing, and superior customer support. OAI products deliver outstanding performance, exceptional versatility, and proven reliability.

oai model 800fsa

Model 800MBA

Topside and Backside Mask Aligner System

The OAI Model 800 Mask Aligner is a semi-automated Topside and a 4-Camera optical backside mask Aligner. It delivers precise (1µm-2µm) alignment accuracy with maximum technical & economic value. More »