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| FEATURES
AND SPECIFICATIONS • High Efficiency, Extremely Uniform, Light Source Systems • Easily Interchangeable Mask Holders and Chucks • Up to 8" diameter substrate capability • Zero alignment shift when moving to expose position • Non-Contact, Soft Contact & Soft-through-Hard Vacuum Contact • Numerous Alignment Optics Options • IR Backside Alignment Option, Single or split-field • High Reliability, Low Maintenance Design • Simple, Manual operation • Excellent Documentation Click here to return to Model 200 aligner main page Click here to return to product selection page |