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OAI's Model
306 UV Power Meter is a highly reliable direct reading Instrument
designed expressly for measuring light intensity at the wafer plane
of mask aligners, UV curing light sources, and any other UV light
source. Special probes enable measurement of light in the visible
range. Calibration accuracy is within +/- 3% and is NIST traceable.
Measurement repeatability is within +/- 1%. It is auto ranging from
0.1 to 1999 mw/cm2 full scale and has 1% linearity in this range.
This instrument features meter to meter matchability.
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here for Model 306 features and specifications
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