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LIGHT SOURCE
HOUSING:
The Model 30 is a highly efficient light source intended for a variety
of applications. Light is collected by an ellipsoidal reflector
and focused on an integrating/condensing lens array to produce uniform
illumination at the exposure plane. This UV light source is available
in various beam sizes up to 16 inches and output spectrums from
220 nm to 450 nm. An appropriate lamp included. Output power ranges
are from 200 watts to 2 kW. All light sources can easily be equipped
with quick change filter assemblies, allowing the user to easily
customize the output spectrum. All light sources are FODEL process
certified. Remote exhaust fans are included when requested. All
systems require an OAI Constant Intensity Controller.
CONSTANT INTENSITY CONTROLLERS:
These dual channel intensity controllers control light source intensity
to a user-desired level and keep it constant over the lifetime of
the lamp. Controllers feature dual-channel optical feedback which
allows changing from one intensity level or spectral sensitivity
to another. Intensity Controllers features an analog meter display
for monitoring lamp intensity and power. Changes range scale automatically
for different intensity levels. Audible alarms alert operator when
to change lamp.
MODEL 150 SHUTTER TIMER:
The shutter timer is for use with free-standing exposure systems.
It activates the light source shutter. The timer range is from 0.1
to 999 seconds. A printed circuit board for controlling the shutter
solenoid may be substituted if desired.
PULL OUT DRAWER WITH ROTATING CHUCK:
The pull out drawer makes loading of the wafer quite easy. When
the drawer is closed the chuck starts rotating and the light source
starts the exposure for an amount of time determined by the setting
of the Model 150 Exposure Timer.
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