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| Adjusting
aligner optics is vital to precise, high yield wafer processing. OAI's
Model 311 Intensity Profiler combines superb human engineering and
measurement accuracy expressly for that purpose. It employs a unique
bar-graph display that presents a graphic portrayal of the percent
deviation of each intensity level from a reference plane. The companion
nine-sensor probe enables the user to continuously measure light intensity
at nine points on the wafer plane. Click here for Model 311 features and specifications Click here to return to product selection page |