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Originally
designed for use with ASM and GCA (Integrated Solutions) Wafer Steppers
the Model 457 Exposure Analyzer System accurately profiles exposure
energy (dose) to assess the performance of the stepper. The included
SUMS Software provides a uniformity test of exposure intensity, time,
and energy. Because SUMS measurements are NIST traceable, SUMS can
be used to evaluate how well different steppers are matched for exposure.
For 365 and 436 nm wavelengths. Other wavelengths are available. Computer
and RS232 cable required for use.
Click here for model 457 features and specifications
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