 |
|
|
|
|
|
|
|
|
 |
|
|||||||
 |
 |
 |
|
|||||
 |
|
|||||||
 |
 |
 |
|
|||||
 |
|
|||||||
 |
 |
 |
|
|||||
 |
|
|||||||
 |
 |
|
||||||
 |
|
|||||||
 |
 |
|
||||||
 |
|
|||||||
| The microprocessor
based Model 458 Exposure Analyzer System accurately profiles exposure
energy (dose) to assess the performance of the stepper. It is designed
for use with the ASM High Intensity, Canon, Nikon, and Ultratech High
Intensity Wafer Steppers. The included SUMS Software provides a uniformity
test of exposure intensity, time, and energy. Because SUMS measurements
are NIST traceable, SUMS can be used to evaluate how well different
steppers are matched for exposure. For 365, 400, 420, and 436 nm wavelengths.
Other wavelengths are available. Computer and RS232 cable required
for use. Click here for model 458 features and specifications Click here to return to product selection page |