SOFTWARE FEATURES

SUMS Software enables up to 81 measurements to be saved and displayed including calculation of percent deviation for measured parameters

HARDWARE FEATURES

• Averages up to 9 exposures
• Digital display provides clear, NIST traceable measurements
• Measures intensity, time, and energy
• Records % deviation over a series of exposures
• Probe wavelength display helps prevent errors in setup
• Simple push button operation provides reliable results
• RS 232 output to download and record analyzer measurement results
• Detachable probes to match the spectral response of many photoresists
• Display readings can be frozen
• Front panel reminders prompt the user
• Rugged aluminum case features handle and probe pouch for portability

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