FEATURES AND SPECIFICATIONS

• Front side submicron printing and alignment
• Mask size up to 10"x10"
• User-selectable substrate-to-mask pressure
• Proximity, soft and soft-through-hard vacuum contact
• Alignment accuracy 0.5µm top side - 1.0µm back side
• Automated sequences as well as fully manual operation
• Lamp power: 350W, 500W, 1000W, 2000W, 5000W
• High efficiency, uniform, exposure w/ Intensity controlling power supply
• Microscope: dual zoom, CCD TV camera
• Throughput >100wph

Click here to return to Model 5000 aligner main page
Click here to return to product selection page