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FEATURES
AND SPECIFICATIONS
High efficiency,
uniform, exposure w/ iIntensity controlling power supply
Submicron
Printing and Level-to-Level Alignments
Easily
Interchangeable Mask Holders and Chucks
User-settable,
"Substrate-to Mask" Pressure
Non-Contact,
Soft Contact and Soft-through-Hard Vacuum Contact
Infrared
Alignment Capability
Numerous
Alignment Optics Options
Automated
Sequences as well as Fully Manual operation
System
Vibration Isolation having 4-quadrant independent adjustment
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