The OAI Model 800 MBA Mask Aligner is a four-camera, manual, optical backside mask alignment system. It delivers ultra-precise (1µm-2µm) optical alignment accuracy and is designed to greatly surpass the performance of any IR backside aligner at an extremely competitive price.

In its basic configuration, the MBA provides full optical backside alignment and is ideal for use in low volume production, R&D labs, and universities. This mask aligner is available with additional automation options for increased throughput.

The Model 800 MBA may be purchased as a topside aligner and upgraded to full optical backside alignment capability when required. The MBA can be configured with a wide variety of OAI light sources that range in power up to 2KW. The mask aligner tooling can accommodate substrates up to 8-inch square, and the wafer chuck is positioned to allow for easy loading and unloading.

Built on a tabletop chassis, the fixed mask holder assembly guarantees alignment accuracy and repeatability. The MBA may be specified with an optional vibration isolation table or custom base. Operating the MBA is easy procedure as all functions are controlled using the easy-to-read, PLC touch-screen. Training time is short. An operator can learn to use the alignment tool effectively in less than one hour.

FEATURES AND SPECIFICATIONS
• Designed for semiconductors, MEMS and nanotechnology
• Excellent for sub-micron printing and level-to-level mask alignment
• Four-camera optical system
• Interchangeable mask holders and chucks
• User-defined & controlled substrate-to-mask pressure
• Non-contact, soft-contact and soft-through-hard vacuum contact capability

contact for more info: sales@oainet.com