|
OAI INSTALLS FRONT-SIDE
MASK ALIGNER FOR MEMS PRODUCTION LINE AT VERIMETRA, INC.
Versatile, front-side mask aligner facilitates manufacturing of
devices featuring the latest MEMS technology.
Milpitas, CA (February 25, 2003) - OAI, a leading Silicon Valley
manufacturer of MEMS and semiconductor capital equipment, announced
delivery of their Model 500 Front-Side Mask Aligner at Verimetra,
Inc. in Pittsburgh PA. Verimetra makes ÒsmartÓmedical devices by
embedding a variety of small sensors within the device. The company
designs and manufactures sensors using micro-electromechanical systems
(MEMS) technology, which is the only method available that produces
sensors small enough to be embedded in surgical devices. Verimetra
is using the Model 500 system for a variety of applications utilizing
the new MEMS manufacturing technology. "We are very satisfied
with both system performance and the level of customer service receivedÓ,
stated Dr. Michele Migliuolo, Ph.D., president, CEO and co-founder
of Verimetra. ÒWe believe the tool will play an important part in
our overall product development and production strategy", adds
Dr. Migliuolo.
Model 500 Front-Side
Mask Aligner System
Built to support the latest advances in MEMS manufacturing technology,
the OAI Model 500 is a versatile, economical tool that can be used
for R&D as well as pilot development and limited production. The
high performance, microprocessor controlled system will deliver
ultra precise, submicron printing and level-to-level alignment.
It is a high efficiency exposure system with an intensity controlling
power supply, vibration isolation feature. Designed for versatility,
the Model 500 series mask aligner system has a number of unique,
user-configurable features including substrate-to-mask pressure
control. It features non-contact, soft contact and soft-through-hard
vacuum contact capability, and has a wide range of options including
special alignment optics, infrared alignment capability, ultra-precise
electronic joy stick, pressure sensitive chucks (for use with brittle
substrates), and multi-spectral exposure systems which allow the
user to select the exposing wavelength (Near UV, Mid UV or Deep
UV). Built with interchangeable subsystem modules, the system can
be configured to meet standard applications as well as many unusual
requirements.
By incorporating feedback loops on all stage axis, both performance
and repeatability is greatly improved. "Our focus is on the
development of new photolithography tools and measurement instruments
aimed at the global MEMS market", reveals Dr. Charles Turk,
President of OAI. "We intend on leveraging our success in the
semiconductor business to establish our company as a leader in MEMS
technology," Turk adds. By drawing from an extensive family
of proven subsystems developed by OAI over the last decade, the
company had the ability to focus on Verimetra's specific application
requirements.
About OAI
OAI is a Silicon Valley-based manufacturer of standard and custom
photolithography mask aligners, UV exposure systems, lightsources,
and instruments for the semiconductor and surface/bulk MEMS industries.
The company is a charter member of the MEMS Industry Group.
OAI is headquartered at 1425 McCandless Drive, Milpitas, CA 95035.
Phone (408) 263-4944. Fax (408) 263-6389
Email: sales@oainet.com
www.oainet.com.
About Verimetra
Verimetra designs and manufactures sensors using micro-electromechanical
systems (MEMS) technology, which is the only method available that
produces sensors small enough to beembedded in surgical devices
without changing the basic form or function of the device. Examples
include forceps, grippers, retractors, drills, and other devices
in the cardiothoracic, dental, and ophthalmic markets. Through the
use of Verimetra's products, medical device manufacturers are able
to deliver features and functionality that, depending on the medical
procedure, improve outcomes, reduce risk and shorten patient recovery
times.
Verimetra is headquartered a:
2403 Sidney Street, Suite 280, Pittsburgh, PA 15203.
Phone (412) 381-2021or (866)-296 MEMS. Fax (412) 381-2600.
Email: michelem@verimetra.com www.verimetra.com
Photos of the OAI Model 500 Front-Side Mask Aligner
System
are available here
File name:
oai500.jpg and/or oai500.eps
###
|
