MEMS PROCESS EQUIPMENT

Mask Aligners
Model 8000 - automatic front/backside mask aligner
Model 800 - optical manual front/backside mask aligner
Model 500 IR - mask aligner
Model 200 IR - mask aligner
Custom Solutions

Wafer Bonder
Wafer bonder - stand alone bonder
Custom Solutions


SEMICONDUCTOR LITHOGRAPHY SYSTEMS

Mask Aligners
Model 200 - table top mask aligner
Model 500 - contact/proximity mask aligner
Model 600 - large area mask aligner
Model 5000 - automated contact/proximity mask aligner
Custom Solutions
Model 200 IR mask aligner
Model 500 IR mask aligner

UV Energy/Intensity Measurement
Model 306 - General Purpose, Single / Dual Channel UV Power Meter
Model 311 - For Fast Adjustment of Aligner Optics
Model 356 - For Contact Aligners
Model 357 - For Wafer Steppers
Model 358 - For High Intensity Wafer Steppers
Model 457 / 458 - For Wafer Steppers with Data Integrated Solution
Model 316 - For Perkin-Elmer Projection Mask Aligners
Model 317 - For ASML(SVG) Perkin-Elmer Projection Mask Aligners
Calibration Services

UV Collimated Light Sources
Model 30 Light Source
Model 30 Enhanced Light Source
Model 2000SM Edge Bead / 2000FL Auto Flood Exposure Systems

GENERAL PURPOSE RADIOMETERS & DETECTORS
Single Channel UV Radiometer
Dual Channel UV Radiometer
UV Curing Radiometer
UVA & UVB Dual Radiometer
Research Grade UV Radiometer & Energy Meter
Special UV Detectors
Calibration Services

SPECIALITY PRODUCTS
Solar Simulators

Resistivity Meters & Probes
Loresta GP - low resistivity
Loresta EP - hand held
Hiresta UP - high resistivity
Powder Resistivity
Calibration Services

N2 Cleaning System for Wafer Fab Reactor Exhaust Piping
Etchers
CVD Reactors
Ion Implanters
Diffusion Furnaces