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MEMS LITHOGRAPHY EQUIPMENT
Mask Aligners
Model 8000 - automated frontside and optical backside mask aligner
Model 800 - manual frontside and optical backside mask aligner
Model 500 IR - frontside and IR backside mask aligner
Model 200 IR - frontside and IR backside mask aligner
Custom Solutions
MEMS INNOVATIVE EQUIPMENT
VPE - Hydrofluoric Acid Vapor Phase Etcher
IRM - Infrared Light Wafer Inspection Microscope
WBI - IR Light Wafer Bonding Inspection Device
CCB - Chip to Chip Bonder
WPWC - Wet Process Wafer Chuck
WEDC - Wafer Chuck for Uniform Electrodeposition
Custom Solutions
Wafer bonder - stand alone wafer bonder
SEMICONDUCTOR LITHOGRAPHY SYSTEMS
Mask Aligners
Model 200 - table top contact mask aligner
Model 500 - contact mask aligner
Model 600 - large area mask aligner
Model 5000 - automated contact proximity mask aligner
Model 500 IR - frontside and IR backside mask aligner
Model 200 IR - frontside and IR backside mask aligner
Custom Solutions
UV Collimated
Light Sources and Exposure Systems
Model 30 Light Source
Model 30 Enhanced Light Source
Model 2000SM - Edge Bead Exposure Systems
Model 2000FL - Automated Flood Exposure Systems
NANOIMPRINT LITHOGRAPHY SYSTEMS
UV MEASUREMENT INSTRUMENTS, RADIOMETERS AND DETECTORS
UV Measurement Systems
Model 306 - Single or Dual Channel UV Power Meter
Model 311 - Nine Channel Power and Energy Meter
Model 356 - For Contact Aligners
Model 357 - For Wafer Steppers
Model 358 - For High Intensity Wafer Steppers
Model 457 / 458 - For Wafer Steppers with Data Integrated Solution
Model 316 - For Perkin-Elmer Projection Mask Aligners
Model 317 - For ASML(SVG) Perkin-Elmer Projection Mask Aligners
Radiometers and Detectors
Single Channel UV Radiometer
Dual Channel UV Radiometer
UV Curing Radiometer
UVA & UVB Dual Radiometer
Research Grade UV Radiometer & Energy Meter
Special UV Detectors
Calibration Services
SOLAR SIMULATION
Class A Solar Simulator
General Solar Simulator
SPECIALITY PRODUCTS
Resistivity Meters & Probes
Loresta GP
- low resistivity
Loresta EP - hand held resitivity meter
Hiresta UP
- high resistivity
Powder Resistivity
Calibration
Services
UV Ozone Systems
UV Ozone Surface Treatment and Cleaning
Lamp Modules
Bench Top System
Standard Automated System
Custom
Solutions
Automation Systems
Clean Room Conveyors
Wafer Sorters
Custom Solutions
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