The Hot N2 Turbo Exhaust system cleans the exhaust piping of wafer fab reactors. It utilizes a unique technology of hot nitrogen injection with turbulent gas movement to eliminate clogging due to the by-products of deposition, etch and ion implant processes in the exhaust piping. This problem is common in Wafer Fab Reactors during semiconductor manufacturing.

Before gaseous chemical by-products are extracted and cleaned by a scrubber, the combination of humidity and cool inner pipe surface temperature cause the by-product gases to particulate into solids. This build up of polymers presents multiple problems with respect to efficient fab operation. These problems include frequent unscheduled downtime, prolonged exposure of the maintenance personnel to toxic reaction by-products, reduced process yields due to particle back-streaming into the process chamber, increased explosion potential, and reduced pump life.

The Hot N2 Turbo Exhaust System works by injecting heated nitrogen directly into the process exhaust line at specific points and in a manner that effectively eliminates the temperature difference between the exhaust gas stream and the inner pipe wall surface. The hot N2 also replaces any moist air inside the pipeline. The results of using this system lead to greatly extended intervals between scheduled pipe and pump maintenance shutdowns, a significant productivity boost for the affected process tool, and increased personnel safety.

The system consists of a controller module, which provides both temperature and N2 flow rate control of up to three HNS injector/heater units. The HNS injector/heaters are flanged and connected directly to all sizes of exhaust pipes. In comparison to the conventional externally applied heating jacket systems, the Hot N2 Turbo Exhaust System offers an attractive installed first cost with very favorable monthly operating cost savings.

FEATURES AND SPECIFICATIONS

• Excellent for CVD, metal etch, ion implant and diffusion processes
• Greatly reduces unscheduled maintenance and down time
• Eliminates contact with hot external pipes
• Reduces build-up of toxic materials, eliminates particle blow-back
• Prolongs pump life
• Lower cost saves time and money compared to heated jacket systems
• Increases safety

contact for more info: sales@oainet.com