FEATURES AND SPECIFICATIONS

• System complete - no other equipment needed.
Built for purpose - NOT a modified mask aligner!
Low cost of ownership.
• In-situ alignment for more reliable and accurate bonds
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• Ease of use, high flexibility
• Standard bonder and custom options to suit your needs.
• Ability to see bond formation via in-situ optics.
• Able to bond thin silicon wafers.
• High thoughput Anodic bonding, using N2, cooling 30 min cycle times
• Fast changeover of wafer platen sizes

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685 River Oaks Parkway San Jose, CA 95134
Phone (408) 232-0600 Toll free (800) 843-8259 Fax (408) 433-9904 sales@oainet.com

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