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FEATURES
AND SPECIFICATIONS
System complete - no other equipment needed.
Built for purpose - NOT
a modified mask aligner!
Low
cost of ownership.
In-situ alignment for more reliable and accurate bonds.
Ease of use, high flexibility
Standard bonder and custom options to suit your needs.
Ability to see bond formation via in-situ optics.
Able to bond thin silicon wafers.
High thoughput Anodic bonding, using N2, cooling 30 min cycle
times
Fast changeover of wafer platen sizes
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