OAI automation systems offer a wide range of wafer handling solutions. Systems can be configured for 50mm (2") compound semiconductor wafers up to 300mm silicon wafers. Our ultra-clean robotic handlers operate in world class clean room environments and can be configured to interface with 300mm FOUP wafer transport systems. At the other extreme, we specialize in handling fragile GaAs and InP wafers. We offer customized automation solutions for your specific needs: wafer loading/unloading, sorting, transferring, OCR reading, binning and inspection.

Ergonomic operator interfaces and a windows NT platform allow easy set-up of process recipes. Modular construction is coupled with high reliability, low maintenance design standards, leading to high equipment availability, thus insuring complete customer satisfaction.

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