FEATURES AND SPECIFICATIONS

• Class 10 Clean Room Compatible
• PRI Wafer Robot
• Wafer Prealigner
• Customer Specified Wafer Carrier Stations
- Cassette Pitch
- Wafer Carrier Type
- Sort Program Recipe
• 400 WPH Throughput
• 300mm Wafer Capability
• Operator Friendly Touch Screen Interface
• Optional Host Interface
• 50mm to 200mm Model Available

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