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Automation Systems

OAI provides a number of versatile solutions for materials handling and automation. OAI wafer sorters can be configured for 50mm (2") compound semiconductor wafers up to 300mm silicon wafers. These ultra-clean robotic handlers operate in world-class clean room environments and can be configured to interface with 300mm FOUP wafer transport systems as well as fragile GaAs and InP wafers.

Wafer Sorters
Handling for cassettes or FOUPS. Wafers up to 300mm