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 Charter Member MEMS Industry group  Member Semiconductor Equipment and Materials International
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OAI is a leading manufacturer
of reliable, precision equipment for MEMS, semiconductors, nanotechnology,
cleanroom automation, and for UV light measurement.
With products installed worldwide, OAI systems are used for
both R&D and production of semiconductors, MEMS and microfluidic
devices. From mask aligners and UV light sources to UV power meters, OAI is a leader
in the industry for over 35 years.
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685 River Oaks Parkway San Jose, CA 95134
Phone (408) 232-0600 Toll free (800) 843-8259 Fax (408) 433-9904 sales@oainet.com
OAI - Mask Aligners - UV Intensity Meters - UV Exposure Systems - MEMS Lithography Equipment - Nanoimprint and Lithography - Solar Simulators
© 2002 OAI. All Rights Reserved.