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Model 800MBA semi-automated Topside and 4-Camera optical backside mask Aligner

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MEMS & Microfluidics

For over 40 years, OAI is in the forefront of manufacturing precision equipment for MEMS, Semiconductor & Microfluidics Industries. OAI offers a complete line of UV Exposure Systems which include Front & Backside Mask Aligners, UV Flood Exposure Systems, Light Sources and instruments for measuring UV Light for both production and R&D.

Mask Aligners

Model 200
Tabletop contact Mask Aligner

Model 200IR
Front and IR Backside Mask Aligner

Model 800E
Enhanced Mask Aligner

Model 6000
Fully Automated, Frontside Mask Aligner for Production

High resolution, non-contact, proximity photolithography system
Low Cost Solution for Photonic Patterning


Contact Liquid Polymer Process (CLiPP) for prototype and production of hydrophobic or hydrophilic surfaces or channels

Custom Solutions

Partner with OAI to solve your unique requirements