mems and nanotechnology hed img

Download a product data sheet - browse list
MORE > >

See a list of our upcoming
trade shows & events
MORE > >

Apply for an OAI Travel Scholarship
MORE>>

Content on this page requires a newer version of Adobe Flash Player.

Get Adobe Flash player

oai model 800mba image
Model 800MBA semi-automated Topside and 4-Camera optical backside mask Aligner

product quote button

Click here for a quick written quote
OR
Call for pricing
(800) 843-8259

MEMS & Microfluidics

For over 40 years, OAI is in the forefront of manufacturing precision equipment for MEMS, Semiconductor & Microfluidics Industries. OAI offers a complete line of UV Exposure Systems which include Front & Backside Mask Aligners, UV Flood Exposure Systems, Light Sources and instruments for measuring UV Light for both production and R&D.

Mask Aligners

Model 200
Tabletop contact Mask Aligner

Model 200IR
Front and IR Backside Mask Aligner

Model 800E
Enhanced High Performance Front and Backside Mask Aligner

Model 6000
Fully Automated, Frontside Mask Aligner for Production

PhableR-100
High resolution, non-contact, proximity photolithography system
Low Cost Solution for Photonic Patterning

Microfluidics

Contact Liquid Polymer Process (CLiPP) for prototype and production of hydrophobic or hydrophilic surfaces or channels

Custom Solutions

Partner with OAI to solve your unique requirements