MEMS Specialized Equipment
OAI has been at the forefront of MEMS manufacturing since the technology was in its infancy. A decade later, the OAI applies their experience and expertise to facilitate your most demanding MEMS, Microfluidics and MicroTAS applications. OAI offers exposure systems, front and backside mask aligners, and UV ozone surface treatment equipment for the most challenging projects or production.
Model VPE
Hydrofluoric acid vapor phase etcher
Model IRM
Infrared light wafer inspection microscope
Model WBI
IR light wafer bonding inspection device
Model CCB
Chip-to-chip bonder
Model WPWC
Wet process wafer chuck
Model WEDC
Wafer chuck for uniform electro-deposition
Custom Solutions
Partner with OAI to solve your unique requirements