MEMS & Microfluidics

Mask Aligners

Model 200
Tabletop contact mask Aligner

Model 200IR
Front and IR backside mask Aligner

Model 6000
Fully Automated Optical Frontside or Backside Mask Aligner for Production

UV Light Sources & Exposure Systems

Model 30 UV Light Source
Collimated modular unit with excellent uniformity

Model 30 Enhanced UV Light Source
Collimated light source with added features

AML Wafer Bonders

AML Wafer Bonder
In-situ AML Wafer Bonder for anodic, silicon direct or compression bonding

Microfluidic Device Process

Contact Liquid Polymer Process
(CLiPP) Microfluidic prototype and production

UV Ozone Surface Treatment System

UV Ozone Surface Treatment System
For improved bonding and cleaning

Custom Solutions

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Semiconductor & Nanotechnology

Mask Aligners

PhableR-100
High resolution, non-contact, proximity photolithography

Model 200
Table top contact mask Aligner

UV Light Sources & Exposure Systems

Model 30 UV Light Source
Collimated, modular unit with excellent uniformity

Model 30 Enhanced UV Light Source
Collimated light source with added features

Model 2000AF
Automated flood exposure systems

Model 2000SM
Automated edge bead exposure systems

Model 2012AF
300mm automated flood exposure systems

Model 2012SM
300mm automated edge bead exposure systems

Nanoimprint Technology (NIL)

Nano Imprint Module
Aligner add-on with high yield release technology

Custom Solutions

Partner with OAI to solve your unique requirements
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NIL Nanoimprint Module

oai NIL nanoimprint lithography image

The OAI Nanoimprint Module System is a modular add-on that may be used on any mask Aligner.

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oai-800mba mask aligner

Model 800E Enhanced High Performance Front and Backside Mask Aligner

The new Enhanced High Performance Front and Backside Mask Aligner is the most technically advanced aligner for R&D and low volume applications. It delivers superior Lithography with the highest performance using OAI’s Advanced Beam Optics (ABO)or OAI's UV LED Exposure Technology. The Model 800E utilizes Windows PC 7 for control and recipe storage. It also comes with joystick controlled alignment and optics stages, and can be configured with non-contact 3pt. wedge effect correction and auto-align capability. These combined features are typically found in more expensive mask aligners but are available for an affordable price on the Model 800E.

Enhanced Performance:

OTHER CAPABILITIES:

OTHER FEATURES: