Enabling Technologies

Wafer Sorters

Wafer Sorter
Handling for cassettes or FOUPS up to 300mm wafers

Nanoimprint Technology (NIL)

Nanoimprint Module
Aligner add-on for use with high yield release technology

Custom Solutions

Partner with OAI to solve your unique requirements

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oai class 1-10 conveyer

Cleanroom Class 1-10 Conveyor

OAI Cleanroom Conveyors are available in several styles; each is suitable for a variety of material handling applications. The C2000 roller-style, intelligent cleanroom conveyor, offers Certified Class 1 cleanroom compatibility for critical applications in process environments that demand the highest level of protection from particulate contamination. Conveyor length is segmented into nine-inch long zones, with each zone independently controlled and networked to adjacent zones and higher-level system hosts. RS232 connectivity is standard, enabling remote monitoring of system performance and remote desktop diagnostics. This intelligent control system provides independent control of each wafer carrier as they are transported throughout the conveyor system.

OAI Cleanroom Conveyors are designed to carry 2 to 8 pound loads at 1 to 9 inches per second velocity. Programmable transport speeds, acceleration and deceleration parameters for each zone fine tune the conveyor operation to meet the overall design objectives for the system.

For less demanding applications, our belt style Class 10 compatible conveyors offer significant cost benefits and greater application flexibility.

Semi-wet (sprayed) applications can be implemented using a version of our belt style conveyors built from materials selected for their suitability to wet or harsh chemical environments. A wet (submerged) conveyor design is also available.