MEMS & Microfluidics

Mask Aligners

Model 200
Tabletop contact mask Aligner

Model 200IR
Front and IR backside mask Aligner

Model 800E
Enhanced Mask Aligner

Model 6000
Fully Automated Optical Frontside or Backside Mask Aligner for Production

AML Wafer Bonders

AML Wafer Bonder
In-situ AML Wafer Bonder for anodic, silicon direct or compression bonding

UV Light Sources & Exposure Systems

Model 30 UV Light Source
Collimated modular unit with excellent uniformity

Model 30 Enhanced UV Light Source
Collimated light source with added features

UV Ozone Surface Treatment System

UV Ozone Surface Treatment System
For improved bonding and cleaning

Custom Solutions

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oai CLiPPContact Liquid Polymer Process (CLiPP) for Microfluidic Devices

CLiPP Contac Liquid Polymer Process is a fabrication process designed for the prototyping and manufacture of microfluidic devices. Perfect for single or multi-dimensional structures, the process is used with readily available liquid UV polymers. The process is suitable for creating hydrophobic or hydrophilic surfaces and channels. For a complete solution, the Contac Liquid Polymer Process (CliPP) modules can be mounted on any OAI mask Aligner system for manufacturing microfluidic devices.