Model IRM
IR Light Wafer Inspection Microscope
IR wafer inspection microscope equipped with top- and back-side illumination, which enables the inspection of phenomena inside the silicon substrate as well as the usage as a conventional microscope. Control of IR and visible illumination intensity: The microscope can be used for Infrared imaging as well as a regular microscope with visual light illumination from the top-side.
Silicon is transparent for infrared light. Our IR light wafer inspection microscope illuminates the silicon substrate from the back-side and captures the light that permeates the substrate. Therefore, it becomes possible to inspect phenomena inside the silicon substrate, which are not visible with a conventional microscope. The microscope is equipped with a long working distance objective. A three-step zoom allows the user to choose the right field of view and magnification. An IR sensitive camera displays the image of the inspected device via USB on your computer. The resolution is better than 3µ with a 5x objective.
Additionally, a top-side illumination is available. This allows the use of the microscope in a conventional mode and the inspection of the top-side of the wafer. The IR microscope is equipped with an x-y table, which accommodates 8” or smaller wafers. The table is motor driven and can be controlled with a joystick.
- Back-side IR illumination
- Front-side illumination
- x-y table for 8'' wafers or smaller
- Long working distance objective
- 3 step zoom
- IR-sensitive camera
- Inspection on computer