Large Area Exposure Systems

Mask Aligners

Model 600
Large area mask aligner

Model 5000E
Mask aligner for large area substrates and display

UV Light & Exposure Systems

Model 2012AF
300mm automated flood exposure systems

Custom Solutions

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oai lightsource grande

Light Source Grande

The OAI Grande UV Light Source is a large area collimated light source. The device is available with output power up to 10KW. Utilizing collimating mirrors, the Light Source Grande is a highly efficient UV light source intended for a variety of larger-scale applications.