Model WPWC
Wet Processing Wafer Chuck & Chuck Carriers
Etching wafers in liquid etching material involves that the whole wafer is in contact with the material. Our wet processing wafer chucks protect the back side of the wafer from being attacked. In this way deep structures can be etched without need to mask the back side. Chucks for any wafer size can be fabricated; single chip chucks are available as well.
The chuck consists of a wafer holder and a clamping ring. The wafer is placed on the holder and fixed by the clamping ring, which is screwed to the chuck. Three precision sealing rings ensure a leak-proof clamping of the wafer. A user-defined recess in the holder minimizes the stress on the clamped wafer.
The chucks are fabricated from PEEK, which is resistant to most of the etching solutions used in microfabrication (HF, KOH, TMAH). For the fabrication of thin membranes a ventilation tube, connecting the enclosed air in the chuck to the atmospheric pressure, can be added. This is highly recommended if the etching solution is heated. Every application is different. We are pleased to design your custom chuck to improve your results.