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MEMS & Microfluidics
Mask Aligners
Model 200
Tabletop contact mask aligner
Model 200IR
Front side and IR backside mask aligner
Model 800FSA
Front side aligner
Model 800MBA
Semi-automated front side and optical backside mask aligner
Model 8000
Fully automated optical front side and backside mask aligner
Wafer Bonders
Wafer Bonder
In-situ wafer bonder for anodic, silicon direct or compression bonding
UV Light & Exposure Systems
Model 30 Light Source
Collimated modular unit with excellent uniformity
Model 30 Enhanced Light Source
Collimated light source with added features
Microfluidic Device Process
Contact Liquid Polymer Process (CLiPP)
Unique process for microfluidic prototyping or production
UV Ozone Surface Treatment System
UV Ozone Surface Treatment System
For improved bonding and cleaning
MEMS Specialized Equipment
Model VPE
Hydrofluoric acid vapor phase etcher
Model IRM
Infrared light wafer inspection microscope
Model WBI
IR light wafer bonding inspection device
Model CCB
Chip-to-chip bonder
Model WPWC
Wet process wafer chuck
Model WEDC
Wafer chuck for uniform electro-deposition
Custom Solutions
Partner with OAI to solve your unique requirements
Semiconductor & Nanotechnology
Mask Aligners
Model 200
Table top contact mask aligner
Model 800FSA
Front side aligner
Model 800MBA
Semi-automated front-side and optical backside mask aligner
Model 5000
Automated contact proximity mask aligner
UV Light & Exposure Systems
Model 30 Light Source
Collimated, modular unit with excellent uniformity
Model 30 Enhanced Light Source
Collimated light source with added features
Model 2000AF
Automated flood exposure systems
Model 2000SM
Automated edge bead exposure systems
Model 2012AF
300mm automated flood exposure systems
Model 2012SM
300mm automated edge bead exposure systems
Nanoimprint Technology (NIL)
Nano Imprint Module
Aligner add-on with high yield release technology
Custom Solutions
Partner with OAI to solve your unique requirements
PV/Solar Technologies
TriSOL Class AAA Solar Simulator
TriSOL 1800nm Class AAA Solar Simulator
TriSOL Large Area and Thin Film Solar Simulator
Custom Solutions
Partner with OAI to solve your unique requirements
Large Area Exposure Systems
Mask Aligners
Model 600
Large area mask aligner
Model 5000E
Mask aligner for large area substrates and display
UV Light & Exposure Systems
Model 2012AF
300mm automated flood exposure systems
Grande UV Light Source
Accommodates a full range of large substrates
Custom Solutions
Partner with OAI to solve your unique requirements
Enabling Technologies
Automation Systems
Cleanroom Conveyors
Solutions for Cleanroom Class 1-10
Wafer Sorters
Wafer Sorter
Handling for cassettes or FOUPS up to 300mm wafers
Nanoimprint Technology (NIL)
Nanoimprint Module
Aligner add-on for use with high yield release technology
Custom Solutions
Partner with OAI to solve your unique requirements