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MEMS & Microfluidics

Mask Aligners

Model 200
Tabletop Contact Mask Aligner

Model 200IR
Front and IR Backside Mask Aligner

Model 800E
Enhanced High Performance Front and Backside Mask Aligner for R&D and low volume applications

Model 6000
Fully Automated, Frontside or Backside Mask Aligner for Production

PhableR 100
System is based on the proprietary PHABLE (short for Photonics Enabler) photolithographic technology developed by Eulitha AG, which makes it possible to print high-resolution structures in a non-contact, proximity photolithography system.

UV Light Sources & Exposure Systems

Model 30 UV Light Source
Collimated modular unit with excellent uniformity

Model 30 Enhanced UV Light Source
Collimated UV Light Source with added features

Semiconductor & Nanotechnology

Mask Aligners

Model 200
Table top Contact Mask Aligner

Model 800E
Enhanced High Performance Front and Backside Mask Aligner for R&D and low volume applications

PhableR 100
System is based on the proprietary PHABLE (short for Photonics Enabler) photolithographic technology developed by Eulitha AG, which makes it possible to print high-resolution structures in a non-contact, proximity photolithography system.

UV Light Sources & Exposure Systems

Model 30 UV Light Source
Collimated, modular unit with excellent uniformity

Model 30 Enhanced UV Light Source
Collimated UV Light Source with added features

Model 2000AF
Automated Flood Exposure Systems

Model 2000SM
Automated Edge Bead Exposure Systems

Model 2012AF
300mm automated Flood Exposure Systems

Model 2012SM
300mm automated Edge Bead Exposure Systems

Nanoimprint Technology (NIL)

Nano Imprint Module
Mask Aligner add-on with high yield release technology

Custom Solutions

Partner with OAI to solve your unique requirements

AML Wafer Bonders

AML Wafer Bonder
In-Situ AML Wafer Bonder for anodic, silicon direct or compression bonding

Microfluidic Device Process

Contact Liquid Polymer Process (CLiPP)
Unique process for microfluidic prototyping or production

Custom Solutions

Partner with OAI to solve your unique requirements

Enabling Technologies

Wafer Sorters

Wafer Sorter
Handling for cassettes or FOUPS up to 300mm wafers

Nanoimprint Technology (NIL)

Nanoimprint Module
Mask Aligner Add-on for use with High Yield Release Technology

Custom Solutions

Partner with OAI to solve your unique requirements

Solar/PV Technologies

TriSOL Class AAA Solar Simulators

TriSOL Class AAA Standard Solar Simulators
Spectral match 400nm–1100 nm; complies with ASTM, JIS, IEC standards. Standard sizes 52mm, 156mm, 208mm, and 300mm.

Application Specific Class AAA Solar Simulators

Designed with special filters for additional spectral match for specific applications

DSSC & Organic Solar Simulators
Meets JIS DSSC Class A spectral match in 50nm increments from 350nm–850nm

Multijunction Solar Simulators
350nm–2000nm

CPV Solar Simulators
Low Dose CPV to 50 suns / High Dose to 1500 suns

Solar Simulators for Photochemistry & Photobiology
UVA, UVB, UVC, VIS

Custom Solar Simulators
Designed to meet your custom specifications

Service & Support
Worldwide customer service and technical support

Solar Cell I-V Measurement Systems

PV I-V Integrated Measurement Systems
Class AAA Solar Simulator, I-V Tester & Test Fixture

Single Long Pulse Test System for High Efficiency Cells
Class AAA Solar Simulator, I-V Tester, Electronic Feedback Control & I-V Rider Software

Standalone I-V Tester & I-V Rider Software
Standard: 1A, 3A, 5A, 10A, and 20A

I-V Rider Software

Standard & Custom Test Fixtures

Flash Solar Power Meter
Measures output power of all flash type solar simulators

Continuous Wave Solar Power Meter
Measures output power of all continuous wave type solar simulators

Calibrated Reference Cells
For all PV cell types

Solar Array Checker
Available in 3.5kW, 1.2kW, 6.0kW and 500W ranges. Also records date, time, fill factor, temperature and more. Stores up to 400 sets of data.

Large Area Exposure Systems

Mask Aligners

Model 5000E
Mask Aligner for large area substrates and display

UV Light Sources & Exposure Systems

Model 2012AF
300mm automated Flood Exposure Systems

UV Light Source Grande
Accommodates a full range of large substrates

Custom Solutions

Partner with OAI to solve your unique requirements